Improvement of Threshold Voltage Reliability of 4H-SiC MOSFETs With Lanthanum Silicate by High Temperature Forming Gas Anneal

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ژورنال

عنوان ژورنال: IEEE Electron Device Letters

سال: 2018

ISSN: 0741-3106,1558-0563

DOI: 10.1109/led.2017.2785851